The Core Nanofabrication cleanrooms provide the ideal environment to produce high-quality devices. With an extensive range of equipment, they can support activities with a broad variety of materials including compound semiconductors, silicon, diamond and organic semiconductor materials from chips to small batches of wafers.

The cleanrooms offer a full range of routine fabrication capabilities including:

  • Mask-based photolithography (chips to 6” wafers)
  • Thermal and e-beam evaporation of metals
  • Dielectric deposition by PECVD and ALD
  • Dry etching of dielectrics, compound semiconductor materials and silicon
  • Metrology, inspection and testing
  • Cleaving, Sawing and die packaging.