Funding
Funding CORDE Funding Model CORDE offers paid-for access to Cavendish Laboratory facilities and equipment. All UK higher education institution (HEI) users are charged the same rates across the board. These charges are based on full economic costing (FEC), plus VAT, and can be charged to UKRI and other major sponsors’ research grants. We encourage users […]
Wafer cleaving and sawing
Wafer cleaving and sawing Brief description Wafer cleaving and sawing, as well as basic device packaging. Jump to booking Wafer cleaving and sawing Brief description Wafer cleaving and sawing, as well as basic device packaging Jump to enquiry Applications and uses To complete the device fabrication process, techniques to singulate individual devices and then to […]
Metrology, inspection and testing
Metrology, inspection and testing Brief description Surface profiling (stylus; AFM, dektak) Dielectric thin film characterisation (ellipsometry) optical microscopy and probe stations Jump to booking Brief description Surface profiling (stylus; AFM, dektak) Dielectric thin film characterisation (ellipsometry) optical microscopy and probe stations Jump to enquiry Metrology, inspection and testing Applications and uses We offer […]
Dielectric Deposition
Dielectric deposition Brief description Including plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (SiNx) and silicon oxide (SiOx), thermal atomic layer deposition (ALD) and e-beam evaporation of AlOx. Jump to booking Dielectric deposition Brief description Including plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (SiNx) and silicon oxide (SiOx), thermal atomic layer deposition (ALD) […]
Deposition of Metals
Deposition of metals Brief description A small suite of thermal and e-beam evaporators, for the depositions of single films or multilayer stacks. Typically the available metals are grouped into ohmic material or gates material (see below). The evaporators can accommodate chips upto 4″ wafers with a range of uniformity (see below). Jump to booking […]
Dry etching
Dry Etching Brief description We have a small suite of dry etch tools for both reactive ion etching (RIE) and inductively coupled plasma (ICP) etching. These tools have a range of process gases, with dedicated tools for Chlorine-based etching of III-V semiconductors and Fluorine-based etching of dielectrics. Jump to booking Dry Etching Brief description We have […]
Wet processing
Wet processing Brief description Dedicated laminar flow wet benches for work with solvents and acids. Wet etching and cleaning of samples, ranging in size from chips up to 4″ wafers. This includes using hydrofluoric acid (HF) and piranha for etching/cleaning. Jump to booking Wet processing Brief description Dedicated laminar flow wet benches for work with […]
Events and Courses
Events and Courses Up Coming Events Up Coming Events Royce Training: Practical Cleanroom Skills STARTS Mon 12 Jan 2026 ENDS Fri 16 Jan 2026 More to come – watch this space! STARTS––ENDS–– More to come – watch this space! STARTS––ENDS–– Past Events In-person Cambridge XPS Summer School 2025 STARTS Mon 4 Aug 202510:00 AM ENDS […]
Research Support
Research Support Events and Courses View upcoming events and training courses organised by CORDE. More information Technical Services Design, development and manufacturing of precision scientific equipment by Cavendish Technical Services. More information
Booking System
Stratocore PPMS (Booking System) Before you book Stratocore PPMS is the CORDE booking platform, and can be used to access further shared facilities on the West Cambridge Campus. For those who will be using the PPMS booking system directly, your Facility Scientist will set you up with a login after the following steps: You have […]