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Our Growth Facility houses two III-V MBE growth systems (‘W’ and ‘V’ Chambers) with identical configurations and in-situ monitoring capabilities capable of a growth temperature range between 0°C to 1000°C and group III materials/dopants. Many of the device structures grown by the group (over 10,000 to date) have been replicated in both MBE chambers. Substrate temperature monitoring is undertaken by both optical pyrometer (0.97mm) and kSA BandiT band edge thermometry. In-situ monitoring of film growth includes RHEED, pyrometric interferometry and spectral reflectometry.
Our Growth Facility houses two III-V MBE growth systems (‘W’ and ‘V’ Chambers) with identical configurations and in-situ monitoring capabilities capable of a growth temperature range between 0°C to 1000°C and group III materials/dopants. Many of the device structures grown by the group (over 10,000 to date) have been replicated in both MBE chambers. Substrate temperature monitoring is undertaken by both optical pyrometer (0.97mm) and kSA BandiT band edge thermometry. In-situ monitoring of film growth includes RHEED, pyrometric interferometry and spectral reflectometry.
W Chamber: Veeco GEN III MBE with connected hydrogen cleaning (620) chamber
V Chamber: Veeco modGEN II MBE
The details of the W and V Chambers are below. The W Chamber has a UHV connected Hydrogen cleaning (620) chamber with an atomic Hydrogen source and SIMS analysis capabilitiesu
Specification | W Chamber & Veeco 620 | V Chamber |
|---|---|---|
Source Cells on Chamber | 12 | 9 |
Group III | Al (x2), In (x3), Ga (x2) Atomic Hydrogen source | Al (x2), In (x1), Ga (x2) |
Group IV | As (x2) - valved cracker cells SIMS analysis | As (x1) - valved cracker cell |
Dopant | Si & Si strip (n-type), C (p-type) | Si (n-type), C & Be (p-type) |
Fully operational
Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services.
Turn around time is generally from one week, although this could be faster or slower depending on the work package; please contact us for more details.
For pricing details and more information about the services we can provide please contact us.
If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the team directly at growth@phy.cam.uk.
We’re happy to help; please contact us using the form above. Or try our searchable equipment directory for an overview of everything CORDE has to offer.
