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The Helios 600 tool is used for imaging and chemical analysis (EDS) and crystallographic analysis (EBSD). It is also used for site specific sample preparation (both cross-section and TEM lamellae preparation), Slive and View, large area mapping and nanopatterning and engineering.
The SHeM is an atom microscope that resembles a miniaturised atom scattering beamline. Most of the system is under high (inc. sample chamber) and ultra-high vacuum and involves scattering a microscale atom beam off a sample. Samples are mounted on standard, or modified, SEM sample stubs.
The facility operates two SHeMs and the instrument used will be matched to your experimental requirements.
Item | Specification |
|---|---|
Imaging resolution | 1 nm at 30 kV STEM 2 nm at 2 kV |
Ion-beam current range | 1 pA to 50 nA |
Ion-beam resolution | 7 nm at 30 kV, typical minimum line width 10-15 nm |
Maximum sample size | 110 cm, weight 500 g, height 85 mm |
Gas Insertion System Pt | Pt deposition, SiO2 deposition and carbon enhance etch |
Software packages | AutoTEM, auto slice and view, Nanobuilder |
EDS system | Oxford Max 150 |
EBSD system | Oxford Nordlys |
Hard to soft material systems.
Available in both User and Service Mode.
Fully operational
Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services.
Please allow two weeks between booking and use.
For pricing details and more information about the services we can provide please contact us.
If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the team directly at electron.microscopy@phy.cam.ac.uk.
We’re happy to help; please contact us using the form above. Or try our searchable equipment directory for an overview of everything CORDE has to offer.
