Manual spin coaters, manual mask aligners, manual development for chips and small wafers up to 3” diameter
Dielectrics, III-V materials, potentially silicon (mainly for photonics, mems)
Thermal, sputter, self-contained systems for deposition of thermal and beam evaporation. Deposition of single films and multilayer stacks of metal.
Including plasma-enhanced chemical vapor deposition (PECVD) using silicon nitride (SiNx) and silicon oxide (SiOx), and thermal atomic layer deposition (ALD).
Surface profiling (stylus; AFM), Dielectric thin film characterisation (ellipsometry), optical microscopy.
If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the Core Nanofabrication Facility Scientist directly at nanofab@phy.cam.ac.uk.