RAITH – EBPG 5200
RAITH – EBPG 5200 Brief description An Electron-beam Lithography system with a thermal field emission gun for operation at 100 kV, and a high KV for high aspect ratio nanostructures, including high speed direct write with full automatization. It has one of the fastest Gaussian Beam system on the market, with fast, arbitrary shape pattern […]
Growth
Growth The Nanofabrication Growth Facility features three Molecular Beam Epitaxial (MBE) Growth systems, operated in a cleanroom environment, covering a wide range of material systems. Key features: Growth of a wide range of material systems, which are subdivided into two main groupings: III-V (Arsenides) & Topological Materials. Dedicated characterisation and measurement systems including Normaski optical […]
Electron-beam Lithography
Electron-beam Lithography Provides services for the fabrication of devices by electron beam lithography, patterning silicon wafers with feature sizes ranging from hundreds of micrometers down to 8nm. Key features: Two electron beam lithography machines, essential manufacturing tools for fabrication of deep nanoscale devices. Contributes to developing novel nanoelectronic devices, on-chip integrated optoelectronic circuits, quantum devices, […]
Core Nanofabrication
Core Nanofabrication The Core Nanofabrication cleanrooms provide the ideal environment to produce high-quality devices. With an extensive range of equipment, they can support activities with a broad variety of materials including compound semiconductors, silicon, diamond and organic semiconductor materials from chips to small batches of wafers. The cleanrooms offer a full range of routine fabrication […]
Nanofabrication
Nanofabrication Photo credit: Paul Raftery The CORDE Nanofabrication Cleanrooms provide state-of-the-art device fabrication capabilities, with the breadth of tooling and flexibility to support cutting-edge research. The CORDE Nanofabrication Facility will initially operate in Service Mode, with two ways of working: You can supply the bare material and our team will undertake the fabrication work, delivering completed material […]
