Metrology, inspection and testing​

Brief description

  • Surface profiling (stylus; AFM, dektak)
  • Dielectric thin film characterisation (ellipsometry)
  • optical microscopy and probe stations

 

Brief description

  • Surface profiling (stylus; AFM, dektak)
  • Dielectric thin film characterisation (ellipsometry)
  • optical microscopy and probe stations
 
 

Metrology, inspection and testing

Applications and uses

We offer standard metrology equipment for the measurement of thin films, step edge measurement, visual inspection and electrical testing.

Components and further information

  • Selection of Dektak surface profiles with manual / programmable scan capabilities
  • Brucker AFM
  • Spectroscopic ellipsometer
  • Optical microscopes with DIC
  • Stereo zoom microscopes
  • DC electrical test

Usage restrictions

Not applicable

Booking

Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services. 

Availability and lead times

Turnaround time is generally from one week, although this could be faster or slower depending on the work package; please contact us for more details.

Pricing

For pricing details and more information about the services we can provide please contact us.

Enquire about this instrument

If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the team directly at nanofab@phy.cam.uk.

Not found what you’re looking for?

We’re happy to help; please contact us using the form above. Or try our searchable equipment directory for an overview of everything CORDE has to offer.