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Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to 3″ wafers, utilising a range of resists and manual development processes.
Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to 3″ wafers, utilising a range of resists and manual development processes.
Item | Compatibility |
---|---|
MJB3 - Mercury Lamp | Chips up to 3" wafers |
MJB4 | Chips up to 4" wafers |
MA6 - DUV illumination | Wafers 2", 3", 4", 6" LED source with selectable UV-line & backside alignment |
Fully operational
Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services.
Turnaround time is generally from one week, although this could be faster or slower depending on the work package; please contact us for more details.
For pricing details and more information about the services we can provide please contact us.
We’re happy to help; please contact us using the form above. Or try our searchable equipment directory for an overview of everything CORDE has to offer.