Leica VB6 UHR​

Leica VB6 UHR

Brief description

The Leica VB6 UHR electron beam lithography machine is used for nanoscale patterning of semiconductor structures. This state-of-the-art system uses an electron beam of diameter 4nm and energy up to 100kV. It is capable of patterning substrates of up to 200mm diameter with a resolution as high as 10nm. This instrument is used to produce samples for a wide variety of academic and industrial users.

Part of Royce at Cambridge

Brief description

The Leica VB6 UHR electron beam lithography machine is used for nanoscale patterning of semiconductor structures. This state-of-the-art system uses an electron beam of diameter 4nm and energy up to 100kV. It is capable of patterning substrates of up to 200mm diameter with a resolution as high as 10nm. This instrument is used to produce samples for a wide variety of academic and industrial users.

Applications and uses

  • Flexible configuration to fit application requirements
  • Fabrication of deep nanoscale devices
  • Developing novel nanoelectronic devices
  • On-chip integrated optoelectronic circuits
  • Quantum devices
  • Layered material related devices
  • Photonic systems
  • Plasmonic systems
  • Cutting edge fabrication of small scale (lab level) and expanding these capabilities towards a large scale production

Components and further details

Contact us for further information.

Compatibility

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Usage restrictions

System is only available through CORDE in service mode.

Important information

Please contact us for more information.

Operating Status

Fully operational

Booking

Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services. 

Availability and lead times

Turn around time is generally from one week, although this could be faster or slower depending on the work package; please contact us for more details.

Pricing

For pricing details and more information about the services we can provide please contact us.

Enquire about this instrument

If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the team directly at ebeam@phy.cam.uk.

Not found what you’re looking for?

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