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Core Nanofabrication

The Core Nanofabrication cleanrooms provide the ideal environment to produce high-quality devices. With an extensive range of equipment, they can support activities with a broad variety of materials including compound semiconductors, silicon, diamond and organic semiconductor materials from chips to small batches of wafers.

The cleanrooms offer a full range of routine fabrication capabilities including:

Mask-based photolithography (chips to 6” wafers)
Thermal and e-beam evaporation of metals
Dielectric deposition by PECVD and ALD

Dry etching of dielectrics, compound semiconductor materials and silicon
Metrology, inspection and testing
Cleaving, Sawing and die packaging

Mask-based photolithography (chips to 6” wafers)
Thermal and e-beam evaporation of metals
Dielectric deposition by PECVD and ALD

Dry etching of dielectrics, compound semiconductor materials and silicon
Metrology, inspection and testing
Cleaving, Sawing and die packaging

Our Capabilities

Photolithography

Manual spin coaters, manual mask aligners, manual development for chips and small wafers up to 3” diameter….

Wet processing

Including hydrofluoric acid (HF) etches

Dry etching

Dielectrics, III-V materials, potentially silicon (mainly for photonics, mems)

Deposition of metals

Thermal, sputter, self-contained systems for deposition of thermal and beam evaporation. Deposition of single films and multilayer stacks of metal.

Dielectric deposition

Including plasma-enhanced chemical vapor deposition (PECVD) using silicon nitride (SiNx) and silicon oxide (SiOx), and thermal atomic layer deposition (ALD).

Metrology, inspection and testing

Surface profiling (stylus; AFM), Dielectric thin film characterisation (ellipsometry), optical microscopy.

Wafer cleaving and sawing

Wafer cleaving and sawing plus basic device packaging.

Processing of Organic Semiconductors

Dedicated laminar flow wet benches for work with solvents and water-based reagents.

Operating Modes

User Mode

Service Mode

Enquire about this facility

Get in touch with us and start your conversation with our team or book your access to the facility on the PPMS user login page.