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Cavendish Laboratory

Photolithography

Brief description

Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to 3″ wafers, utilising a range of resists and manual development processes.

 

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aligner photolithography
aligner2 photolithography
aligner3 photolithography

Photolithography

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Brief description

Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to 3″ wafers, utilising a range of resists and manual development processes.

 

Jump to enquiry
aligner photolithography
aligner2 photolithography
aligner3 photolithography

Applications and uses

Optical lithography uses an etched chrome photomask to transfer the required device design into a photo-sensitive resist coated substrate. 

Components and further details

We have MJB3, MJB4 and MA6 mask aligners from Karl Suss which allow us to work with substrates from chips (~5x5mm) up to 6″ wafers and across a range of UV and DUV wavelengths. We also offer resist processing capabilities including coaters, spinners and developers for a range of materials including negative, positive and lift-off resists for e-beam and optical lithography, as well as hot-plates and ovens for pre/post-bake for substrates up to 6″

Compatibility

Item

Compatibility

MJB3 - Mercury Lamp

Chips up to 3" wafers

MJB4

Chips up to 4" wafers

MA6 - DUV illumination

Wafers 2", 3", 4", 6" LED source with selectable UV-line & backside alignment

Usage restrictions

Not applicable
 

Operating Status

Fully operational

Booking

Whether you are new to the National Facility or have visited us before, our Getting Access page contains more information about booking our services. 

Availability and lead times

Turnaround time is generally from one week, although this could be faster or slower depending on the work package; please contact us for more details.

Pricing

For pricing details and more information about the services we can provide please contact us.

Enquire about this instrument

If you are new to CORDE we would recommend contacting us via the form below to ensure we can help you with a detailed response. Or you can contact the team directly at nanofab@phy.cam.uk.
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