Metrology, inspection and testing
Metrology, inspection and testing Brief description Surface profiling (stylus; AFM, dektak) Dielectric thin film characterisation (ellipsometry) optical microscopy and probe stations Jump to booking Brief description Surface profiling (stylus; AFM, dektak) Dielectric thin film characterisation (ellipsometry) optical microscopy and probe stations Jump to enquiry Metrology, inspection and testing Applications and uses We offer […]
Dielectric Deposition
Dielectric deposition Brief description Including plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (SiNx) and silicon oxide (SiOx), thermal atomic layer deposition (ALD) and e-beam evaporation of AlOx. Jump to booking Dielectric deposition Brief description Including plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (SiNx) and silicon oxide (SiOx), thermal atomic layer deposition (ALD) […]
Deposition of Metals
Deposition of metals Brief description A small suite of thermal and e-beam evaporators, for the depositions of single films or multilayer stacks. Typically the available metals are grouped into ohmic material or gates material (see below). The evaporators can accommodate chips upto 4″ wafers with a range of uniformity (see below). Jump to booking […]
Dry etching
Dry Etching Brief description We have a small suite of dry etch tools for both reactive ion etching (RIE) and inductively coupled plasma (ICP) etching. These tools have a range of process gases, with dedicated tools for Chlorine-based etching of III-V semiconductors and Fluorine-based etching of dielectrics. Jump to booking Dry Etching Brief description We have […]
Wet processing
Wet processing Brief description Dedicated laminar flow wet benches for work with solvents and acids. Wet etching and cleaning of samples, ranging in size from chips upto 4″ wafers. This includes using hydrofluoric acid (HF) and piranha for etching/cleaning. Jump to booking Wet processing Brief description Dedicated laminar flow wet benches for work with […]
Events and Courses
Events and Courses Upcoming Events In-person Cambridge XPS Summer School 2025 STARTSMon 4 Aug 202510:00 AMENDSThu 7 Aug 20252:00 PM More to come – watch this space! STARTS––ENDS–– More to come – watch this space! STARTS––ENDS––
Research Support
Research Support Events and Courses CORDE hosted training courses in 2025. More information Technical Services Design, development and manufacturing of precision scientific equipment. More information
Booking System
Stratocore PPMS (Booking System) Before you book Stratocore PPMS is the CORDE booking platform, and can be used to access further shared facilities on the West Cambridge Campus. For those who will be using the PPMS booking system directly, your Facility Scientist will set you up with a login after the following steps: You have […]
People
People Meet the people who run CORDE: our team of experienced and dedicated Physicists. Want to get in touch? Please use our contact us form. Prof. Andy Jardine CORDE Director Andy is Professor of Experimental Physics with an international track record in surface and 2D material structure & dynamics.His background is in technique development for nano-eV […]
Photolithography
Photolithography Brief description Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to 3″ wafers, utilising a range of resists and manual development processes. Jump to booking Photolithography Brief description Our nanofabrication photolithography room has manual spin coaters and manual mask aligners for chips and up to […]
